{"id":238,"date":"2020-09-28T10:21:35","date_gmt":"2020-09-28T02:21:35","guid":{"rendered":"\/\/www.100wfx.com\/?p=238"},"modified":"2020-09-28T10:21:35","modified_gmt":"2020-09-28T02:21:35","slug":"5nm%e8%8a%af%e7%89%87%e6%88%90%e6%9c%ac%e6%9b%9d%e5%85%89%ef%bc%9a%e4%b8%80%e9%a2%97%e6%9c%80%e9%ab%98%e5%8f%af%e8%be%be2900%e5%85%83%ef%bc%8c%e6%89%8b%e6%9c%ba%e8%a6%81%e8%b7%9f%e7%9d%80%e6%b6%a8","status":"publish","type":"post","link":"\/\/www.100wfx.com\/news\/238.html","title":{"rendered":"5nm\u82af\u7247\u6210\u672c\u66dd\u5149\uff1a\u4e00\u9897\u6700\u9ad8\u53ef\u8fbe2900\u5143\uff0c\u624b\u673a\u8981\u8ddf\u7740\u6da8\u4ef7\u4e86\uff1f"},"content":{"rendered":"
\u6b64\u524d\u82f9\u679c\u5df2\u7ecf\u53d1\u5e03\u4e86A14\u82af\u7247\uff0c\u4f5c\u4e3a\u5168\u7403\u9996\u9897\u91c7\u7528\u53f0\u79ef\u75355nm\u5de5\u827a\u7684\u82af\u7247\uff0c\u5176\u96c6\u6210118\u4ebf\u4e2a\u6676\u4f53\u7ba1\uff0c\u5728\u6027\u80fd\u548c\u80fd\u6548\u4e0a\u76f8\u6bd4A13\u90fd\u6709\u4e00\u5b9a\u63d0\u5347\u3002\u4f46A14\u82af\u7247\u91c7\u7528\u53f0\u79ef\u75355nm\u5de5\u827a\uff0c\u6240\u4ed8\u51fa\u7684\u4ee3\u4ef7\u4e5f\u662f\u76f8\u5f53\u9ad8\u7684\uff01<\/p>\n
\n
\u3000\u3000\u6700\u8fd1\u7f8e\u56fdCSET\u7684\u4e00\u4efd\u7814\u7a76\u62a5\u544a\u6307\u51fa\uff0c\u53f0\u79ef\u75355nm\u5236\u9020\u768412\u540b\u6676\u5706\u6210\u672c\u7ea6\u4e3a16988\u7f8e\u5143\uff0c<\/strong>\u8fdc\u9ad8\u4e8e7nm\u7ea6\u4e3a9346\u7f8e\u5143\u7684\u6210\u672c\uff0c\u8be5\u62a5\u544a\u540c\u65f6\u8fd8\u4f30\u7b97\u51fa\u4e86\u6bcf\u98975nm\u82af\u7247\u7684\u5236\u9020\u6210\u672c\u3002<\/p>\n \u4ee5\u82f1\u4f1f\u8fbeP100 GPU\u4e3a\u4f8b\uff0c\u8fd9\u6b3e\u4ea7\u54c1\u91c7\u7528\u53f0\u79ef\u7535\u768416nm\u8282\u70b9\u5904\u5236\u9020\uff0c\u5305\u542b\u4e86153\u4ebf\u4e2a\u6676\u4f53\u7ba1\uff0c\u88f8\u7247\u9762\u79ef\u4e3a610\u5e73\u65b9\u6beb\u7c73\u3002\u82e5\u6309\u6b64\u8ba1\u7b97\uff0c\u6bcf\u7247300mm\u76f4\u5f84\u7684\u6676\u5706\u53ea\u53ef\u4ee5\u5236\u902071.4\u98975nm\u82af\u7247\uff0c\u5e73\u644a\u5355\u9897\u82af\u7247\u6210\u672c\u5c06\u9ad8\u8fbe238\u7f8e\u5143\uff0c\u7ea6\u54081600\u5143\u4eba\u6c11\u5e01\u3002<\/strong><\/p>\n \u3000\u3000<\/p>\n \u3000\u3000\u4e8b\u5b9e\u4e0a\u8fd9\u8fd8\u53ea\u662f\u6676\u5706\u5236\u9020\u6210\u672c\uff0c\u800c\u4e00\u9897\u82af\u7247\u7684\u8bde\u751f\u8fd8\u9700\u8981\u5305\u542b\u8bbe\u8ba1\u6210\u672c\u548c\u5c01\u88c5\u3001\u6d4b\u8bd5\u6210\u672c\uff0c\u8fd9\u90e8\u5206\u7684\u6210\u672c\u4e5f\u662f\u975e\u5e38\u9ad8\u7684\u3002<\/p>\n \u6709\u5e02\u573a\u7814\u7a76\u673a\u6784\u7ed9\u51fa\u6570\u636e\uff0c\u82af\u7247\u7684\u6210\u672c\u8fc5\u901f\u66b4\u589e\uff0c7nm\u82af\u7247\u8bbe\u8ba1\u6210\u672c\u4e3a3.49\u4ebf\u7f8e\u5143\uff0c5nm\u82af\u7247\u8bbe\u8ba1\u6210\u672c\u5c06\u589e\u81f34.76\u4ebf\u7f8e\u5143\u3002<\/strong>\u4e5f\u5c31\u662f\u8bf4\uff0c\u50cf\u8bbe\u8ba1\u4e00\u6b3eA14\u6216\u8005\u9e92\u9e9f5nm\u82af\u7247\uff0c\u603b\u6210\u672c\u53ef\u80fd\u9ad8\u8fbe\u8fd15\u4ebf\u7f8e\u5143\u3002<\/p>\n \u3000\u3000<\/p>\n \u3000\u3000\u8be5\u673a\u6784\u901a\u8fc7\u8c03\u67e5\u4f30\u7b97\u540e\uff0c\u7ed9\u51fa\u4e86\u6bcf\u9897\u82af\u7247\u7684\u8bbe\u8ba1\u548c\u5c01\u88c5\u3001\u6d4b\u8bd5\u6210\u672c\uff0c\u5206\u522b\u4e3a108\u7f8e\u5143\u548c80\u7f8e\u5143\u3002<\/strong><\/p>\n \u5982\u679c\u8fd9\u4efd\u7814\u7a76\u62a5\u544a\u7684\u51c6\u786e\u6027\u9ad8\u7684\u8bdd\uff0c\u90a3\u4e48\u610f\u5473\u7740\u4e00\u98975nm\u82af\u7247\u652f\u4ed8\u7684\u603b\u6210\u672c\u5c06\u53ef\u80fd\u8fbe\u5230426\u7f8e\u5143\uff0c\u7ea6\u54082900\u5143\u4eba\u6c11\u5e01\u3002<\/strong><\/p>\n \u3000\u3000<\/p>\n \u8bbe\u8ba1\u4e00\u6b3e5nm\u82af\u7247\u7684\u603b\u6210\u672c\u5c06\u9ad8\u8fbe\u8fd15\u4ebf\u7f8e\u5143\uff0c\u90a3\u5e73\u5747\u5230\u6bcf\u9897\u82af\u7247\u7684\u6210\u672c\u6709\u591a\u9ad8\uff1fCSET\u5728\u62a5\u544a\u4e2d\u7684\u6a21\u578b\u7c7b\u6bd4\u4e86\u82f1\u4f1f\u8fbeP100 GPU\uff0c\u8fd9\u6b3eGPU\u57fa\u4e8e\u53f0\u79ef\u753516nm\u8282\u70b9\u5904\u5236\u9020\uff0c\u5305\u542b153\u4ebf\u4e2a\u6676\u4f53\u7ba1\uff0c\u88f8\u7247\u9762\u79ef\u4e3a610 \u5e73\u65b9\u6beb\u7c73\uff0c\u76f8\u5f53\u4e8e\u6676\u4f53\u7ba1\u5bc6\u5ea625 MTr\/mm 2\u3002<\/span><\/p>\n \u7531\u6b64\u8ba1\u7b97\uff0c\u76f4\u5f84300\u6beb\u7c73\u7684\u7845\u6676\u7247\u80fd\u591f\u751f\u4ea771.4\u9897 610\u5e73\u65b9\u6beb\u7c73\u7684\u82af\u7247\u3002<\/span><\/p>\n \u5047\u8bbe5nm GPU\u7684\u82af\u7247\u9762\u79ef\u4e3a610\u5e73\u65b9\u6beb\u7c73\uff0c\u5e76\u4e14\u6676\u4f53\u7ba1\u5bc6\u5ea6\u6bd4P100 GPU\u9ad8\uff0c\u8fbe\u5230907\u4ebf\u4e2a\u6676\u4f53\u7ba1\u3002\u4e0b\u8868\u4e2d\u662f\u7528\u6a21\u578b\u4f30\u7b97\u7684\u53f0\u79ef\u753590\u81f35nm\u4e4b\u95f4\u7684\u8282\u70b9\u6676\u4f53\u7ba1\u5bc6\u5ea6\u3002\u572890\u81f37nm\u8303\u56f4\u5185\u7684\u8282\u70b9\uff0c\u6a21\u578b\u4f7f\u7528\u5177\u6709\u76f8\u540c\u89c4\u683c\u7684\u5047\u60f3GPU\uff0c\u5305\u62ec\u6676\u4f53\u7ba1\u9664\u6676\u4f53\u7ba1\u5bc6\u5ea6\uff0c\u5047\u60f3\u76845nm GPU\u4e0e\u5047\u8bbe\u8282\u70b9\u5173\u8054\u3002<\/span><\/p>\n \u3000\u3000<\/p>\n \u3000\u3000\u5f53\u7136\uff0c\u8fd9\u4e48\u4f30\u7b97\u4e5f\u53ea\u662f\u6700\u7406\u60f3\u7684\u72b6\u6001\uff0c\u8003\u8651\u52305nm\u5de5\u827a\u624d\u5f00\u59cb\u6b63\u5f0f\u91cf\u4ea7\uff0c\u6240\u4ee5\u53ef\u80fd\u4f1a\u6709\u6bd4\u8f83\u9ad8\u7684\u635f\u8017\uff0c<\/strong>\u540c\u65f6\u5149\u523b\u673a\u7684\u6210\u672c\u4e5f\u6781\u9ad8\uff0c\u56e0\u4e3a\u8981\u91cd\u5ea6\u4f9d\u8d56\u6781\u7d2b\u5916\u5149EUV\u6280\u672f\uff0c<\/strong>\u800c\u4e00\u53f0EUV\u5149\u523b\u673a\u7684\u4ef7\u683c\u9ad8\u8fbe1.2\u4ebf\u7f8e\u5143\u3002<\/p>\n \u6602\u8d35\u7684\u8bbe\u5907\u548c\u5de5\u827a\u6210\u672c\uff0c\u63a8\u52a8\u4e86\u82af\u7247\u4ef7\u683c\u7684\u4e0a\u6da8\uff0c\u8fd9\u662f\u65e0\u6cd5\u907f\u514d\u7684\u3002\u6b63\u59822018\u5e74\u7684\u65f6\u5019\uff0c\u5bf9\u4e8e\u5a92\u4f53\u54a8\u8be25nm\u7684\u4ef7\u683c\uff0c\u53f0\u79ef\u7535\u5b98\u65b9\u8868\u793a\uff0c\u9884\u8ba1\u57285nm\u6295\u8d44\u4e86250\u4ebf\u7f8e\u5143\uff0c\u5230\u65f6\u5019\u5404\u4f4d\u5c31\u77e5\u9053\u4ee5\u540e\u4ef7\u683c\u662f\u591a\u5c11\u4e86\uff01<\/strong><\/p>\n \u3000\u3000<\/p>\n \u3000\u3000\u6240\u4ee5\u4ece\u8fd9\u4e9b\u60c5\u51b5\u6765\u770b\uff0c5nm\u82af\u7247\u4ef7\u683c\u80af\u5b9a\u662f\u8981\u63d0\u5347\u4e86\uff0c\u5982\u6b64\u4e00\u6765\u624b\u673a\u5382\u5546\u80af\u5b9a\u4e5f\u5750\u4e0d\u4f4f\u4e86\uff0c\u81ea\u7136\u8981\u8003\u8651\u63d0\u5347\u624b\u673a\u7684\u4ef7\u683c\u7684\u4e8b\u60c5\u3002\u6b63\u56e0\u4e3a\u5728\u6210\u672c\u4e0a\u63d0\u5347\u4e86\u5f88\u591a\uff0c\u6240\u4ee5\u591a\u65b9\u6d88\u606f\u90fd\u6709\u7206\u6599\uff0c\u82f9\u679c\u4eca\u5e74\u5c06\u5bf9\u90e8\u5206\u914d\u4ef6\u548c\u914d\u7f6e\u8fdb\u884c\u9609\u5272\uff0c\u4ee5\u964d\u4f4e\u7efc\u5408\u6210\u672c\u3002<\/strong><\/p>\n <\/p>\n","protected":false},"excerpt":{"rendered":" \u6b64\u524d\u82f9\u679c\u5df2\u7ecf\u53d1\u5e03\u4e86A14\u82af\u7247\uff0c\u4f5c\u4e3a\u5168\u7403\u9996\u9897\u91c7\u7528\u53f0\u79ef\u75355nm\u5de5… <\/p>\n","protected":false},"author":1,"featured_media":239,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_jetpack_memberships_contains_paid_content":false,"footnotes":""},"categories":[6],"tags":[10,186],"class_list":["post-238","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-news","tag-5nm","tag-186"],"yoast_head":"\n